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Tech Stock News and Analysis
Wednesday, June 14, 2006
Axcelis Announces Single Wafer Optima MD Order from National Semiconductor
Wednesday June 14, 8:47 am ET
Innovative Implant Platform Continues to Garner Momentum Worldwide

BEVERLY, Mass.----June 14, 2006--Axcelis Technologies, Inc. (NASDAQ: ACLS - News) has received an order for its single wafer Optima MD ion implanter from National Semiconductor for production of advanced analog integrated circuits. The Optima MD gives customers the flexibility, precision and productivity for the widest array of low energy, mid dose applications, especially well, channel and HALO processes. Axcelis plans to ship the Optima MD implanter to National Semiconductor's fab in South Portland, Maine in the third quarter of 2006.

"Axcelis and National Semiconductor have shared a long history of success in the mid dose arena," said John McClean, senior buyer for National Semiconductor's Maine facility. "The Optima MD's low energy capability, superior angle control and zero energy contamination made the choice to continue our relationship with Axcelis an easy one."

"The Optima MD continues to win over customers thanks to its exceptional manufacturing efficiency and yield performance - a testimony to the innovative system design," said Mary Puma, chairman and CEO of Axcelis. "We are thrilled that National Semiconductor shares the same enthusiasm we do in continuing our outstanding partnership."

Axcelis designed the entire Optima platform as an innovative, cost-effective approach to implantation needs in and beyond the 65nm technology node. Capable of addressing the entire range of implant energies, the single wafer platform encompasses three systems: the Optima MD for low energy, mid dose implant applications, the Optima HD for high dose applications, and the Optima HE for high energy applications. This platform, which joins Axcelis' market leading multi-wafer implant systems, positions Axcelis as the only supplier able to provide customers with a total solution for their implant needs.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Saijo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company.
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